Fast Aberration Measurement in Multi-Dimensional STEM
نویسندگان
چکیده
منابع مشابه
Fast Aberration Measurement in Multi-Dimensional STEM
The main resolution limits in high-performance (S)TEM are due to the imperfections or ‘aberrations’ of the electron lenses. Correction of these aberrations requires the ability to quickly and accurately measure lens aberrations to align or ‘tune’ an aberration-corrector. The conventional method to measure aberrations in the TEM is to record a series of bright field (BF) images in a Zemlin table...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2016
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927616002117